| 摘要 |
An apparatus and a method for detection with a scanning microscope ( 1 ) are disclosed. The scanning microscope ( 1 ) encompasses a scanning device ( 7 ) that guides an illuminating light beam ( 3 ) through a scanning optical system ( 12 ) and a microscope optical system ( 13 ) and over or through a specimen ( 15 ). A digital circuit ( 30 ), which periodically interrogates the detected signals within a pixel (P<SUB>x,y</SUB>) and calculates an average therefrom, is placed after the detector unit ( 19 ).
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