<p>Disclosed is a piezoelectric sensor (1) comprising a piezoelectric element (10) which receives a pressure at a first surface and generates electrical charges from the pressure. In this piezoelectric sensor (1), a space is formed in a region facing a second surface of the piezoelectric element that is opposite to the first surface.</p>
申请公布号
WO2007032259(A1)
申请公布日期
2007.03.22
申请号
WO2006JP317811
申请日期
2006.09.08
申请人
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY;AKIYAMA, MORITO;UENO, NAOHIRO;TABARU, TATSUO
