| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an image sensor capable of saving a protective film for a micro-lens. SOLUTION: A method for manufacturing an image sensor including a photoreceptive first region and a second region for forming a pad comprises: a step for forming a metal wire and a protective film in the first region; a step for selectively etching the protective film to form an open portion to expose the metal wire on which a pad contact is formed; a step for forming a first over-coat layer in the first region, and forming an over coat layer plug in the open portion in the second region; a step for forming a color filter and a micro-lens in order on the first over coat layer in the first region; a step for forming a photoresist pattern to expose the over coat layer plug; and a step for removing the photoresist pattern. COPYRIGHT: (C)2007,JPO&INPIT |
