| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing organic electroluminescence element which patterns a sealing film without using a wet process. SOLUTION: The method for manufacturing organic electroluminescence element comprises steps of: forming a lamination film 6 by preparing a substrate 1 on which a first electrode 2 is formed, and by laminating an organic layer 3 including a light emitting layer and a second electrode 4 on the first electrode 1 in order; forming a sealing film 5 covering the whole lamination film 6; placing a metal mask 9 on the sealing film 5 having an opening 11 in a predetermined pattern; and patterning the sealing film 5 by removing a part corresponding to the opening 11 of the metal mask 9 on the sealing mask 5 with a dry etching technique. COPYRIGHT: (C)2007,JPO&INPIT
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