发明名称 |
Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus |
摘要 |
A method for cleaning elements of a lithographic apparatus, for example optical elements such as a collector mirror, includes providing a gas containing nitrogen; generating nitrogen radicals from at least part of the gas, thereby forming a radical containing gas; and providing at least part of the radical containing gas to the one or more elements of the apparatus. A lithographic apparatus includes a source and an optical element, and an electrical discharge generator arranged to generate a radio frequency discharge.
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申请公布号 |
US2007062557(A1) |
申请公布日期 |
2007.03.22 |
申请号 |
US20060367693 |
申请日期 |
2006.03.06 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
RAKHIMOVA TATYANA V.;BANINE VADIM Y.;IVANOV VLADIMIR V.;KOSHELEV KONSTANTIN N.;MOORS JOHANNES H.J.;KOVALEV ALEKSANDER S.;LOPAEV DMITRIY V. |
分类号 |
B08B6/00;C25F1/00;C25F3/30;C25F5/00 |
主分类号 |
B08B6/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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