A METHOD FOR THE MICROMECHANICAL MEASUREMENT OF ACCELERATION AND A MICROMECHANICAL ACCELERATION SENSOR

摘要

The invention relates to measurement devices used in the measurement of acceleration, and more specifically, to micromechanical acceleration sensors. The invention seeks to offer an improved method for the measurement of acceleration directed to three or two dimensions using a micromechanical acceleration sensor as well as an improved micro- mechanical acceleration sensor. Using this invention, the functional reliability of a sensor can be monitored in constant use, and it is suitable for use particularly in small-sized micromechanical acceleration sensor solutions measuring in relation to several axes.