| 摘要 |
PROBLEM TO BE SOLVED: To provide a handler for accurately enabling position matching of a semiconductor tester and a contact head. SOLUTION: The handler comprising a position matching means for matching the position of the contact head on the semiconductor tester comprises an XYθfloating means provided on the contact head and for moving the contact head in a contact face direction of the semiconductor tester and the contact head, and a face following means provided on the contact head independently from the XYθfloating means and for correcting inclination of a contact face of the semiconductor tester and the contact head after operation of the XYθfloating means. COPYRIGHT: (C)2007,JPO&INPIT
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