| 摘要 |
PROBLEM TO BE SOLVED: To easily obtain information serving as a guide for setting a condition for an observation/inspection condition, as to determination work for the observation/inspection condition in an observation/inspection device. SOLUTION: A computer 100 as an image processing means image-processes sequentially digitalized electric signal outputs supplied from an image sensor 91 via an A/D converter 92, even during control-driving a polarizing plate rotation driving means 93 to rotate a polarizing plate 89 around an optical axis as the center shaft. An animation image data of an image data of an optical image of a sample surface varied in response to the change of a polarizing plate rotation direction is acquired by generating an image data of then optical image of the sample surface from time to time to be storage-controlled continuously into a storage device 106. COPYRIGHT: (C)2007,JPO&INPIT
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