| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a fine particle array body, a thin film array body and a magnetic recording medium with high productivity by forming a fine phase separation structure obtained by phase separation of block copolymers and by using self-organizing arrangement obtained by selectively adsorbing fine particles to the fine phase separation structure. SOLUTION: A block copolymer layer is formed on a substrate and subjected to phase separation to form a fine phase separation structure and to obtain an array of fine regions having different adsorption characteristics from other phases. Fine particles are selectively adsorbed to the fine regions to obtain a fine particle array body. When a plurality of particles are used, particles are two-dimensionally arranged into a closest-packed state. The obtained particle array body is used as an etching mask to etch a thin film formed on a substrate to obtain a thin film array body. By forming a magnetic film as the thin film, a magnetic recording medium is obtained. By this method, fine particles can be two-dimensionally arrayed in a closest packed state in fine regions arrayed by self organization of di-block copolymers, and the array body exhibits excellent performance as an etching mask for forming a thin film pattern. COPYRIGHT: (C)2007,JPO&INPIT
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