发明名称 PLANARIZING A SEMICONDUCTOR STRUCTURE TO FORM REPLACEMENT METAL GATES
摘要 <p>A sacrificial gate structure, including nitride and fill layers, may be replaced with a metal gate electrode. The metal gate electrode may again be covered with a nitride layer covered by a fill layer. The replacement of the nitride and fill layers may reintroduce strain and provide an etch stop.</p>
申请公布号 KR20070032807(A) 申请公布日期 2007.03.22
申请号 KR20077003160 申请日期 2005.07.14
申请人 发明人
分类号 H01L21/335;H01L29/78 主分类号 H01L21/335
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