| 摘要 |
PROBLEM TO BE SOLVED: To provide an asperity detector and asperity detection method for detecting asperities on the surface of an object. SOLUTION: A deformation detector includes a pressure receiving sheet SR which has a fluid F therewithin and becomes deformed by receiving pressure, a pressure keeping sheet SK for keeping the inside pressure, and a deformation detection means D for detecting relative movement with respect to the fluid F occurring when the pressure acting upon the pressure receiving sheet changes. The asperity detection method for detecting the asperities on the object allows the asperity detector and the object to relatively move with the asperity detector while being abutted with the surface of the object. COPYRIGHT: (C)2007,JPO&INPIT
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