发明名称 SURFACE INSPECTION DEVICE, SURFACE INSPECTION METHOD, AND MANUFACTURING METHOD OF FILM
摘要 PROBLEM TO BE SOLVED: To solve the problems of dimness of an imaged image or jut-out of an inspection object from the imaged image caused by a secular change of a position relation of the inspection surface to a light irradiation means and an imaging means, when detecting optically an irregular defect of the inspection object surface having a cylindrical side shape and mirror surface reflectivity. SOLUTION: In this surface inspection device equipped with the light irradiation means having a light emitting portion F with a prescribed shape for irradiating light toward the inspection object having the cylindrical side shape and the mirror surface reflectivity, wherein the curvature and/or the position of the inspection surface are changed with elapse of time, and with the imaging means for imaging the inspection object, the inspection object surface is inspected based on the imaged image. A data processing means is equipped with an inspection object arrangement calculation means for calculating the position and/or the magnitude of light on the imaged image based on information in a range occupied by the light emitting portion F on the imaged image, and with an imaging adjusting means having an imaging control means for controlling zoom and/or focus of the imaging means 6 based on an output from the inspection object arrangement calculation means. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007071562(A) 申请公布日期 2007.03.22
申请号 JP20050256047 申请日期 2005.09.05
申请人 TORAY IND INC 发明人 SAKUMA ATSUSHI;NAKAI YASUHIRO;NISHISHITA JUNICHI;NAKAJIMA HIROKI
分类号 G01N21/952;G01N21/892 主分类号 G01N21/952
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