| 摘要 |
A diffraction grating and a manufacturing method thereof are provided to mass-produce diffraction gratings with good optical characteristic and reliability by bonding glass substrates after antireflection-coating the glass substrates. A diffraction grating manufacturing method is composed of steps of: previously antireflection-coating a light emitting surface, that is one surface of a first glass substrate(11), emitting the diffracted light and an incident surface, that is one surface of a second glass substrate(17), receiving the incident light; coating the other surface of the first glass substrate with a film layer(12) made from isotropic organic matters or polymers; forming an uneven part(20) by pressing the film layer by a stamper having a grating pattern; irradiating ultraviolet rays on the film layer having the uneven part; bonding the first and second glass substrates by interposing an adhesive layer(16) made from isotropic organic matters or polymers with a refractive index different from that of the film layer, between the other surface of the second glass substrate and the uneven part; and curing the adhesive layer by irradiating ultraviolet rays on the adhesive layer.
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