| 摘要 |
PROBLEM TO BE SOLVED: To enhance ejection efficiency while stabilizing the ejecting direction and the ejecting quantity. SOLUTION: A first photosensitive material is formed in layer on a substrate, a straight portion-forming member having a straight hole portion is arranged on the first photosensitive material, the hole is filled with a second photosensitive material and irradiated with predetermined light from the straight portion-forming member side thus exposing the second photosensitive material substantially entirely. On the other hand, the first photosensitive material is exposed in tapered shape having a diameter increasing gradually toward the substrate side. Subsequently, the straight portion-forming member is stripped and the first and second photosensitive materials are developed. Using the first and photosensitive materials remaining on the substrate in the developing process as a die, a metal layer becoming a nozzle plate is formed on the substrate by plating and then the metal layer is stripped from the substrate and the first and photosensitive materials thus producing a nozzle plate. COPYRIGHT: (C)2007,JPO&INPIT |
