| 摘要 |
PURPOSE: An apparatus for developing a substrate is provided to recollect a developing agent applied on a substrate at a short period of time during a transferring of the substrate. CONSTITUTION: An apparatus for developing a substrate includes a transferring line(1), a developing agent supply(2), a developing agent collector(3), more than two arms, and a plurality of lifts. The transferring line includes a plurality of rolling rods having aligned axes in a direction normal to a transferring direction of the substrate. The developing agent supply is implemented on an upstream of the transferring line. The developing agent collector is implemented on the transferring line at a downstream of the developing agent supply. The arms are parallel with the transferring direction. The lifts are included in the arms for moving the slant substrate. The lifts are protruded between the rolling rods as the arms rise. The lifts are elongated in a direction to be far from a support point of a rotational movement. |
