| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the need for the output optical path of conventional SPR measurement systems. SOLUTION: The integrated opto-electric sensor comprises a wavenumber matching structure integrated on a silicon substrate, a first conductive electrode that is adjacent to one of a lightly doped and an undoped region in the silicon substrate to form a Schottky junction, a dielectric adjacent to the second surface of the first conductive electrode, and a second conductive electrode formed at the silicon substrate. The first conductive electrode and second conductive electrode provide coupling for a detected signal that is provided in response to the illumination of the wavenumber matching structure by an optical signal. COPYRIGHT: (C)2007,JPO&INPIT
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