PLASMA GENERATING DEVICE AND PLASMA GENERATING METHOD
摘要
<p>[PROBLEMS] To provide a method and a device for securely and easily generating plasma in a thin tube with a small tube diameter. [MEANS FOR SOLVING THE PROBLEMS] A first electrode (30) formed of a conductive member covered with an insulator or a dielectric is inserted into the thin tube (10). The thin tube (10) is placed on a second electrode (20), and an AC voltage or a pulse voltage is applied across the first electrode (30) and the second electrode (20) by a power source (40). As a result, the plasma occurs around the first electrode (30) in the thin tube (10).</p>
