| 摘要 |
PROBLEM TO BE SOLVED: To adjust capacitance of a capacitor in short time. SOLUTION: In a trimming method of the capacitor 30, capacitance of the capacitor 30 is reduced by removing, with a laser beam, a part of the capacitor 30 constituted of a dielectric 33 and a pair of electrodes overlapped and laminated in a height direction by sandwiching the dielectric 33. The laser beam is made incident on a laser beam incidence port 311-m (m=1 to n) arranged in either of a pair or the electrodes, and the dielectric 33 is removed. Thus, capacitance of the capacitor 30 is made small. COPYRIGHT: (C)2007,JPO&INPIT
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