| 摘要 |
PROBLEM TO BE SOLVED: To reduce an initial investment or running cost in manufacture of a dynamic quantity sensor. SOLUTION: An insulating film 20 is formed by a plating technology on the surface of a diaphragm 10 of a pressure receiving tube 2. In addition, a metal thin film 30 is formed by the plating technology on the upper surface of the insulating film 20. Then, the metal thin film 30 is removed partially to thereby process a strain gage 35. COPYRIGHT: (C)2007,JPO&INPIT
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