发明名称 HEATING ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a heating element with no corrosion at a power supply terminal, having a long life of a protection layer, and having durability with compactness and of low manufacturing cost. SOLUTION: The heating element has a thermal resistant base member 1 of one body construction in which a plate shape part 1a with a heater pattern 3a formed, a rod shape part 1b in which a conductive path 3b protruding from one face of the plate shape part 1a is formed, and a top end part 1c, which is positioned on the opposite end to the plate shape part 1a of the rod shape part 1b and has a power supply terminal 3c, are formed. The element has a dielectric layer 2 of an insulating property on the surface of the thermal resistant base member 1 and a conductive layer 3 of a conductive property on the dielectric layer 2. The conductive layer 3 has the heating pattern 3a formed at the plate shape part 1a, the conductive path 3b formed at the rod shape part 1b, and the power supply terminal 3c formed at the top end part 1c, and the surface of the heater pattern 3a and the conductive path 3b is covered with an insulating protection layer 4 and formed integrally. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007073492(A) 申请公布日期 2007.03.22
申请号 JP20060017306 申请日期 2006.01.26
申请人 SHIN ETSU CHEM CO LTD 发明人 KIMURA NOBORU;KUSHIHASHI TAKUMA
分类号 H05B3/74;H01L21/02;H01L21/683;H05B3/02;H05B3/10;H05B3/14;H05B3/20 主分类号 H05B3/74
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