SEMICONDUCTOR PROBE WITH HIGH-RESOLUTION RESISTIVE TIP, AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor probe equipped with a high-resolution resistive tip, and to provide a method for manufacturing the same. SOLUTION: The semiconductor probe with the high-resolution resistive tip includes a cantilever in which a first impurity is doped and at the end of which a projecting resistive convex section is formed by doping second impurity, having the polarity differing from that of the first impurity at a low-concentration level; and first and second electrode regions, which are disposed on the both sides of the resistive convex section of the cantilever and in which the second impurity is doped to a high-concentration level. COPYRIGHT: (C)2007,JPO&INPIT