| 摘要 |
PROBLEM TO BE SOLVED: To enable to change control contents described in memories of a microprocessor, an FPGA and a CPLD that are used as component elements of a scanning electron microscope, without moving from the development base of a manufacturer or a service center. SOLUTION: An SEM control means 41 of a scanning electron microscope device body 10 is set at a maintenance mode via a computer 50 processing an operation function about an observation operation processed with a normal SEM control means 41, or an output function about an observation operation via a data telecommunication line 80 from a maintenance computer 60 of a development base, a service center or the like of the manufacturer. In such a state, control content of each of the desired parts of a device body control system 30 are changed via communication via a control command between the computer 50 and the SEM control means 41. COPYRIGHT: (C)2007,JPO&INPIT
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