| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro valve which can improve operation stability by suppressing inclination of a valve element, enhance the response speed and reduce pressure loss in a flow passage between the valve element and a periphery of a valve hole in the state that the valve element opens the valve hole, as compared with a conventional structure in which a valve element is supported by a frame through a plurality of beams and a movable electrode is formed in the valve element only. SOLUTION: A valve element forming substrate 20 includes a diaphragm part 23 which is continuously and integrally formed with a frame part 21 inside it and which is flexible in a thickness direction. A valve element 22 is continuously and integrally formed in the midsection of the diaphragm part 23. In the diaphragm part 23, a plurality of flow passage holes 26 forming a flow passage of fluid between an inflow opening 50 and a valve hole 12 are penetrated in the thickness direction. A movable electrode 24 is formed in the whole area of the diaphragm part 23. A fixed electrode 34 is formed in a portion opposite to the diaphragm part 23 in a fixed electrode forming substrate 30. COPYRIGHT: (C)2007,JPO&INPIT
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