DATA REPRESENTATION RELATING TO A NON-SAMPLED WORKPIECE
摘要
A method, apparatus, and a system for providing data representation associated with non-sampled workpieces. Measured metrology data relating to a first workpiece is received. Metrology data corresponding to a second workpiece is approximated based upon the metrology data relating to the first workpiece to provide a projected metrology data relating to the second workpiece.
申请公布号
WO2007032867(A2)
申请公布日期
2007.03.22
申请号
WO2006US32744
申请日期
2006.08.23
申请人
ADVANCED MICRO DEVICES, INC.;REEVES, STEVEN, P.;MCINTYRE, MICHAEL, G.