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发明名称
LACTONE COMPOUND, LACTONE-CONTAINING MONOMER, POLYMER OF THOSE, RESIST COMPOSITION USING SAME, METHOD FOR FORMING PATTERN USING SAME
摘要
申请公布号
KR20070032328(A)
申请公布日期
2007.03.21
申请号
KR20077000814
申请日期
2007.01.12
申请人
发明人
分类号
C07D311/00;C07D491/08;C07D495/08;H01L21/027
主分类号
C07D311/00
代理机构
代理人
主权项
地址
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