Method and apparatus for transferring and loading a reticle with a robotic reticle end-effector,申请号EP20020027411-传众专利搜索

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发明名称	Method and apparatus for transferring and loading a reticle with a robotic reticle end-effector
摘要
申请公布号	EP1327913(A3)	申请公布日期	2007.03.21
申请号	EP20020027411	申请日期	2002.12.09
申请人	ASML HOLDING N.V.	发明人	FREIDMAN, GLENN M.;KOCHERSPERGER, PETER;LAGANZA, JOSEPH
分类号	G03F9/00;B65G49/07;G03F7/20;H01L21/027;H01L21/677	主分类号	G03F9/00
代理机构		代理人
主权项
地址

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