| 摘要 |
A vacuum apparatus for drying a substrate is provided to minimize an installation area by using a conveyer type substrate transfer unit and a conveyer type chamber transfer unit. A vacuum apparatus for drying a substrate comprises one or more vacuum chamber(100) having a chamber door and a vacuum pump(130). The vacuum apparatus further includes a substrate transfer unit(200) and a chamber transfer unit. The substrate transfer unit includes a transfer substrate contactor(210) for transferring a substrate with respect to the vacuum chamber, a transfer driver(220) for providing transfer force to the transfer substrate contactor, and a transfer device(230) for applying the transfer force to the transfer substrate contactor. The chamber transfer unit includes a chamber substrate contactor for transferring the substrate, a chamber driver for providing the transfer force to the chamber substrate contactor, and a chamber transfer device for applying the transfer force to the chamber substrate contactor.
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