| 申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY;ANELVA CORPORATION;ULVAC, INC.;KANTO DENKA KOGYO CO., LTD.;SANYO ELECTRIC CO., LTD.;SHOWA DENKO K.K.;SONY CORPORATION;DAIKIN INDUSTRIES, LTD.;TOKYO ELECTRON LIMITED;NEC ELECTRONICS CORPORATION;HITACHI KOKUSAI ELECTRIC INC.;MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;RENESAS TECHNOLOGY CORP.;ASAHI GLASS COMPANY, LIMITED |
发明人 |
SEKIYA,A;MITSUI,Y;OHIRA,Y;YONEMURA,T |
