发明名称 OVERLAY VERNIER
摘要 <p>An overlay vernier is provided to prevent the degradation of reliability in an image sensor by modulating the structure of a main vernier applied to a contact portion. An overlay vernier includes a main vernier(220) and an auxiliary vernier(240) within a predetermined space. The predetermined space is defined by the main vernier. The main and auxiliary verniers are arranged like a rectangle type structure, respectively. The main and auxiliary verniers are composed of a plurality of rod type parts spaced apart from each other. Each corner portion of the main and auxiliary verniers is partially opened. The plurality of rod type parts have the same length.</p>
申请公布号 KR100699145(B1) 申请公布日期 2007.03.21
申请号 KR20050131501 申请日期 2005.12.28
申请人 发明人
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
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