METHOD OF DELIVERING SUBSTRATE TO FILM FORMING DEVICE FOR DISK-LIKE SUBSTRATE, MECHANISM FOR DELIVERING SUBSTRATE USED FOR THE METHOD, SUBSTRATE HOLDER, AND METHOD OF MANUFACTURING DISK-LIKE RECORDING MEDIUM USING THE METHOD,申请号KR20047020502-传众专利搜索

发明名称	METHOD OF DELIVERING SUBSTRATE TO FILM FORMING DEVICE FOR DISK-LIKE SUBSTRATE, MECHANISM FOR DELIVERING SUBSTRATE USED FOR THE METHOD, SUBSTRATE HOLDER, AND METHOD OF MANUFACTURING DISK-LIKE RECORDING MEDIUM USING THE METHOD
摘要
申请公布号	KR100697165(B1)	申请公布日期	2007.03.21
申请号	KR20047020502	申请日期	2004.12.17
申请人		发明人
分类号	G11B7/26	主分类号	G11B7/26
代理机构		代理人
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