Device for measuring the positions of electronic components

摘要

The device has a handling device (105) for a wafer carrier (120). A stationary camera (105) is fixed to the frame (110) which is arranged in a manner that the components (122) are detectable under the chamfer observation angle. The handling device has a sliding device (111) which is arranged relative to the frame for positioning of the wafer carrier. An independent claim is included for the method for position measurement of electronic components.