DISCRETELY CONTROLLED MICROMIRROR WITH MULTI-LEVEL POSITIONS.

摘要

This invention provides the two types of Discretely Controlled Micromirror(DCM), which can overcome disadvantages of the conventional electrostaticmicromirrors. The first type micromirror is a Variable Support Discretely ControlledMicromirror (VSDCM), which has a larger displacement range than the conventionalelectrostatic micromirror. The displacement accuracy of the VSDCM is betterthan that of the conventional electrostatic micromirror and the low drivingvoltage is compatible with IC components. The second type of DCM, the SegmentedElectrode Discretely Controlled Micromirror (SEDCM) has same disadvantageswith the conventional electrostatic micromirror. But the SEDCM is compatiblewith known microelectronics technologies.