发明名称 |
Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses |
摘要 |
Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition, and at least one continuously rotating or step-wise rotatable compensator which transmits an electromagnetic beam therethrough and imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation; and at least one multiple element lens which also transmits the electromagnetic beam therethrough.
|
申请公布号 |
US7193710(B1) |
申请公布日期 |
2007.03.20 |
申请号 |
US20040829620 |
申请日期 |
2004.04.22 |
申请人 |
J.A. WOOLLAM CO., INC. |
发明人 |
JOHS BLAINE D.;LIPHARDT MARTIN M.;HALE JEFFREY S.;HERZINGER CRAIG M.;GREEN STEVEN E.;HE PING;WOOLLAM JOHN A. |
分类号 |
G01J4/00 |
主分类号 |
G01J4/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|