Method and apparatus for tracking reticle history

摘要

A method includes storing data associated with a plurality of reticles. Reticle history information is received. The reticle history information is linked to a selected reticle. The linked reticle history information is stored. A reticle information system includes a reticle database and a loader. The reticle database is operable to store data associated with a plurality of reticles. The loader is operable to receive reticle history information, link the reticle history information to a selected reticle, and store the linked reticle history information in the reticle database.