发明名称 Method of manufacturing nanowires and electronic device
摘要 In the method, semiconductor substrates are etched to provide nanowires, said substrates comprising a first layer of a first material and a second layer of a second material with a mutual interface, which first and second materials are different. They may be different in the doping type. Alternatively, the main constituent of the material may be different, for example SiGe or SiC versus Si, or InP versus InAs. In the resulting nanowires, the interface is atomically sharp. The electronic devices having nanowires between a first and second electrode accordingly have very good electroluminescent and optoelectronic properties.
申请公布号 US7192533(B2) 申请公布日期 2007.03.20
申请号 US20040509564 申请日期 2004.09.28
申请人 KONINKLIJKE PHILIPS ELECTRONICS N.V. 发明人 BAKKERS ERIK PETRUS ANTONIUS MARIA;ROOZEBOOM FREDDY;VERHOEVEN JOHANNES FRANSISCUS CORNELIS MARIA;VAN DER SLUIS PAUL
分类号 B82B3/00;C03C25/68;H01L21/306;H01L21/3063;H01L21/3065;H01L21/308;H01L29/06;H01L29/12;H01L29/786;H01L33/00 主分类号 B82B3/00
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