ORIENTATION DEPENDENT SHIELDING FOR USE WITH DIPOLE ILLUMINATION TECHNIQUES

摘要

A method of printing a pattern having vertically oriented features and horizontally oriented features on a substrate utilizing dipole illumination, which includes the steps of: identifying background areas contained in the pattern; generating a vertical component mask comprising non-resolvable horizontally oriented features in the background areas; generating a horizontal component mask comprising non-resolvable vertically oriented features in the background areas; illuminating said vertical component mask utilizing an X- pole illumination; and illuminating said horizontal component mask utilizing a Y- pole illumination.