VERTICAL HEAT TREATING APPARATUS AND AUTOMATIC TEACHING METHOD FOR TRANSFER MECHANISM,申请号KR20067013811-传众专利搜索

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发明名称	VERTICAL HEAT TREATING APPARATUS AND AUTOMATIC TEACHING METHOD FOR TRANSFER MECHANISM
摘要
申请公布号	KR20070031853(A)	申请公布日期	2007.03.20
申请号	KR20067013811	申请日期	2005.03.25
申请人		发明人
分类号	H01L21/68;B65G49/07;G05B19/19;H01L21/22	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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