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发明名称
SiO DEPOSITION MATERIAL, RAW MATERIAL Si POWDER, AND METHOD FOR PRODUCING SiO DEPOSITION MATERIAL
摘要
申请公布号
KR20070032056(A)
申请公布日期
2007.03.20
申请号
KR20077002959
申请日期
2007.02.07
申请人
发明人
分类号
C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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