| 摘要 |
FIELD: vacuum engineering. ^ SUBSTANCE: method is designed for gas exhaust in vacuum facilities. Proposed method includes delivery and acceleration of gaseous medium in system with exchange and removal of gas flows through system of main lines, perforated pipes and deflectors with holes installed in tight chamber. Holes in pipes and holes in deflectors are arranged opposite to each other which provides movement of gaseous medium. One of main lines serves to supply gaseous medium, and the other, to remove said medium. ^ EFFECT: increased capacity of device, enlarged functional capabilities of proposed method. ^ 2 cl, 5 dwg |
