| 摘要 |
A continuous metal thin film depositing equipment for mass production capable of continuously depositing a metal thin film on a substrate without destruction of vacuum in a deposition chamber or replacement of metal boats is provided. In a metal thin film depositing equipment for depositing the metal by evaporating a metal, a continuous metal thin film depositing equipment for mass production comprises: a casing(20) installed through a cut part formed on the bottom of a chamber; two or more metal boats(30) contained in the casing; a cooling means for cooling the casing and the metal boats; and a transfer means which horizontally moves the casing within a range of the cut part, and is formed under the bottom of the chamber, wherein the cooling means comprises a refrigerant feeder for feeding a cooling solvent, and a refrigerant channel formed by inner walls of the casing and inner walls of the metal boats. The metal boats comprise a pair of electrode parts(31) heated by electric resistance, and a cavity(32) which is formed between the electrode parts, and into which an aluminum wire as an evaporation material is fed, wherein a power supply line(54) and a cooling water line(53) are formed on the electrodes respectively.
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