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发明名称
HEAT-TREATING APPARATUS
摘要
申请公布号
KR100697402(B1)
申请公布日期
2007.03.20
申请号
KR20067002759
申请日期
2006.02.09
申请人
发明人
分类号
C23C16/455;H01L21/324;C23C16/458;H01L21/00;H01L21/205;H01L21/22;H01L21/26
主分类号
C23C16/455
代理机构
代理人
主权项
地址
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