| 摘要 |
An object of the present invention is to provide a display panel inspection method, a display panel inspection device, and a display panel manufacturing method capable of determining the optimum optical conditions for inspecting a surface shape from the structural characteristic of an object to be inspected, reflecting the determined conditions on the inspection device to carry out the inspection with high accuracy, improving the yield without degrading the yield rate, and manufacturing a substrate of high quality and high reliability. The display panel inspection method has an illuminating means, an imaging means, and a signal processing means, and is characterized in that bright and dark signals of fluorescent layers are measured while moving a substrate or the illuminating means and the imaging means in the direction across the plurality of fluorescent layers applied to the substrate with predetermined intervals, and application volume for each fluorescent layer is measured from the obtained signals. |
