| 发明名称 |
Apparatus for monitoring the functionality of an optical element |
| 摘要 |
An apparatus for monitoring the functionality of an optical element includes a detector and a light source whose radiation is reflected to the detector by a surface of the optical element facing the detector and the light source.
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| 申请公布号 |
US7193700(B2) |
申请公布日期 |
2007.03.20 |
| 申请号 |
US20030660790 |
申请日期 |
2003.09.12 |
| 申请人 |
TRUMPF LASERTECHNIK GMBH |
发明人 |
FLISS STEFAN |
| 分类号 |
G01N21/88;G01M11/00;G01N21/55 |
主分类号 |
G01N21/88 |
| 代理机构 |
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代理人 |
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