SOURCE/DRAIN ELECTRODES, THIN-FILM TRANSISTOR SUBSTRATES, MANUFACTURE METHODS THEREOF, AND DISPLAY DEVICES

摘要

A source/drain electrode is used in a thin-film transistor substrate containing a substrate, a thin-film transistor semiconductor layer, source/drain electrodes, and a transparent picture electrode. The source/drain electrode includes a nitrogen-containing layer and a thin film of pure aluminum or an aluminum alloy. Nitrogen of the nitrogen-containing layer binds to silicon of the thin-film transistor semiconductor layer, and the thin film of pure aluminum or aluminum alloy is connected to the thin- film transistor semiconductor layer through the nitrogen-containing layer.