发明名称 Mask frame assembly and thin layer deposition apparatus therewith
摘要 A mask frame assembly for a thin layer deposition apparatus is provided to reduce error occurrence by forming a deposition pattern on a precise position of a substrate without an error. A mask frame assembly includes a mask(110), a mask frame(120), and at least one magnet member(114). The mask(110) has an opening(112a) of a predetermined pattern and a strip for forming the opening. The mask frame supports the mask and at least one magnet member is attached to the mask away from the opening. By a magnetic force between an upper magnet disposed on an upper portion of the mask assembly and the magnet member, the mask is prevented from being partially deformed downwardly.
申请公布号 KR100696551(B1) 申请公布日期 2007.03.19
申请号 KR20050120924 申请日期 2005.12.09
申请人 发明人
分类号 H05B33/10;C23C14/24 主分类号 H05B33/10
代理机构 代理人
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