| 摘要 |
A deposition apparatus is provided to be distinctly aligned between a substrate and a mask by increasing an adhesion force between the substrate and the mask. A deposition apparatus includes a chamber(110), a mask assembly(130), and a magnet unit(140). The mask assembly(130) includes a mask(131) and a mask frame(135). The mask(131) is arranged to deposit a substrate(120) inserted into the chamber(110). The mask frame(135) supports the mask(131). The magnet unit(140) is arranged to closely adhere the mask assembly(130) to the substrate(120) by a magnetic force. The magnet unit(140) includes a first magnet unit(141), and a second magnet unit(142). The first magnet unit(141) is arranged to be corresponded to the mask(131). The second magnet unit is arranged corresponding to the mask frame. A magnetic force of the second magnet unit is larger than that of the first magnet unit.
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