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发明名称
具整合式探针驱动装置的基材支撑件
摘要
本发明描述一种用以测试在一大面积基材上复数个电子装置之方法及设备。该设备包括一探针定位组合件,其系耦合至一测试腔中之一基材支撑件。该基材支撑件是一测试桌,其能够进行X、Y及Z轴方向之移动,且该探针定位组合件能够相对于测试桌而移动。一探针交换器被设置于邻近测试腔处且其可经过和探针定位组合件之协力及相对移动而协助探针传输。本发明亦描述一种负载锁定腔,其具有一单一传输门引动器、一气压基材升降件、及复数个基材排列构件。
申请公布号
TW200710397
申请公布日期
2007.03.16
申请号
TW095119466
申请日期
2006.06.01
申请人
应用材料股份有限公司
发明人
约翰史东班哲明;艾包德斐兹E ABBOUD, FAYEZ E.;盖叶鸿T NGUYEN, HUNG T.
分类号
G01R1/04(2006.01)
主分类号
G01R1/04(2006.01)
代理机构
代理人
蔡坤财;李世章
主权项
地址
美国
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