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发明名称
多进口原子层沈积反应器
摘要
一种反应器,其配置系为使一基板受到气相反应物交替且重复的表面作用。该反应器包括一反应室,多数个进口,及一排气出口。该反应室包括一反应空间。该反应器尚包括一设于该反应室内部之一气流控制导引构造。该气流控制导引构造系设于该反应空间之上方,且系插设于该等进口与该反应空间之间。该气流控制导引构造包括多数个管道,且各该管道系由该等进口之其中一个进口延伸至该反应空间之上游周边。由该进口延伸至该反应空间之各该管道系逐渐变宽。该反应器更包括一设于该反应空间内部之基板支撑器。
申请公布号
TW200710266
申请公布日期
2007.03.16
申请号
TW095116114
申请日期
2006.05.05
申请人
ASM吉尼泰克公司
发明人
金大渊;李政镐;刘龙
分类号
C23C16/455(2006.01);C23C16/54(2006.01);C23C16/509(2006.01)
主分类号
C23C16/455(2006.01)
代理机构
代理人
刘緖伦
主权项
地址
韩国
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