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发明名称
工具部件的反应性气体清洁方法
摘要
本发明涉及具有在半导体沉积室中形成的多余的残留物涂层的沾污工具部件的清洁的改进。在该方法中,将待清洁的沾污部件从半导体沉积室中移走,并放置在离线于半导体沉积室的反应室中,即在离线气体反应室中。当在所述离线反应器中时,在将残留物转化为挥发性物质的条件下,使沾污部件与反应气接触,然后从所述离线气体反应室中除去挥发性物质,从而在离线反应器中除去沾污部件上的残留物涂层。
申请公布号
TW200710972
申请公布日期
2007.03.16
申请号
TW095116794
申请日期
2006.05.11
申请人
气体产品及化学品股份公司
发明人
吴定军;伊真约瑟喀瓦奇;齐宾
分类号
H01L21/30(2006.01);H01L21/00(2006.01);B08B13/00(2006.01)
主分类号
H01L21/30(2006.01)
代理机构
代理人
陈展俊;林圣富
主权项
地址
美国
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