发明名称 Method for depositing electrode and the organic light emitting display produced using it
摘要 Disclosed are an organic light emitting display and a deposition method for depositing an electrode or a passivation layer by means of a box cathode sputtering method or a facing target sputtering method by mixing Ar with an inert gas heavier than Ar gas. The present embodiments provide an organic light emitting display including a substrate; a thin film transistor formed on the substrate; a first electrode formed on the thin film transistor; an organic layer formed on the first electrode; and a second electrode layer sputter-deposited on the organic layer by mixing Ar gas with an inert gas heavier than said Ar using a box cathode sputtering method or a facing target sputtering method.
申请公布号 KR20070030620(A) 申请公布日期 2007.03.16
申请号 KR20050085413 申请日期 2005.09.13
申请人 发明人
分类号 H05B33/10;H05B33/26 主分类号 H05B33/10
代理机构 代理人
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